Maximum Sample Size: 10×10 cm²
Maximum Sample Height: few cm
Possibility to heat the substrate
ITO, Mo, MoNa, SiO2, ZnMgO, ZnO, ZnO:Al
Manufacturer: Plassys
Model: MP500 / MP600
Minimum training time to use the machine: 3 days
This process allows to deposit on every kind of sample various TCO for quick test purpose
Specifications: 3 targets in confocal mode, polarization of the substrate
Possible: ZnO:Al, ZnMgO, SiO2, ITO + others on demand
Sputtering process under vacuum (around 10—3 mbar) and Ar/O2 atmosphere
RF excitation of the electrode
Rotation of the sample for a perfect homogeneity
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