Maximum Sample Size: 15×15 cm2
Maximum Sample Height: 5 cm
Surface and cross-section measurements possible
Conductive samples (no pre-treatment)
Nonconductive sample (pre-treatment needed)
Manufacturer: Zeiss
Model: Merlin compact
Minimum training time to use the machine: 4 days
SEM: Morphological and chemical contrast images @ nanoscale
EDX: 5 cm
EBIC: Local current generated by the SEM electron beam @ nanoscale
Resolution SEM: XY <30nm
Resolution EDX: XY <50nm
EBIC: <30nm
Maximum Scan Size: 500µm x 500µm
SEM: Electronic gun interacts with the sample and secondary or backscattered electron are detected to provide an image. Can be destructive to organic or soft materials
EDX: X-ray photons generated locally by the SEM gun are detected and the chemical composition is deduced from the spectrum obtained
EBIC: A map of the current generated locally by the SEM gun is measured
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